In the case of the semiconductor industry, an abrasive and a slurry are used for chemical mechanical polishing. The process ensures that the wafer has a smooth, reflective surface and is free of any hazardous chemicals.

An abrasive is a mineral or other material that is used to shape and polish a material through rubbing. They are seen frequently in a number of different domestic, industrial and technological applications. There are several different physical and chemical composition abrasives as well as many different shapes for these abrasives, so there are almost an unlimited number of combinations. Abrasives are used in the processes of buffing, honing, cutting, drilling, grinding, sharpening, and of course, for semiconductors, polishing. This accelerates the process of chemical mechanical polishing.

A slurry is a thick suspension of solids in a liquid. The slurry used in chemical mechanical polishing is an abrasive itself. It is typically a colloid, or a mechanical mixture. The chemicals of the slurry react with the material to be removed from the wafer and in some cases weaken it away.

Abrasives can occur either naturally or can be synthesized. Natural minerals have been considered more efficient and superior to synthesized abrasives for the past few decades but recent advances in technology have seen the line between the two types has gotten thinner and thinner. Natural minerals may also contain impurities, while synthetic abrasives can be identical to natural minerals and do not contain the risk of these impurities. The biggest difference is that natural abrasives are mined while synthetic abrasives are manufactured.

The following is a list of some abrasives that are common within the semiconductor industry:

Naturally occurring abrasives:

• Silicon Carbide
• Boron Carbide
• Calcified Aluminium Oxide
• Fused Aluminium Oxide
• Cerium Oxide

Abrasives and slurries have a number of different forms and uses in a variety of industrial fields. For the semiconductor industry, they are mostly used for chemical mechanical polishing.