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PVA TePla AG Plasma Systems - Bumping System Suppliers
Company : PVA TePla AG Plasma Systems
Address 1 : Hans Riedl Strasse 5
Address 2 :
City : Feldkirchen
State :
Post/Zip Code : 85622
Country : Germany
Phone : +49 89 905030
Fax : +49 89 90503 185
Email : info@pvatepla.com
Description :
Planar Plasma System GIGAfab M
Most compact version of the GIGAfab model family, targeting SU-8 Removal, MEMS Fabrication, Wafer Bumping and Flat Panel Display Technology.
Featuring unique planar microwave plasma source technology and temperature-controlled substrate plate for large area processing in R&D and production. Suitable for uniform processing of single large or multiple substrates for Descum, Ashing and Surface Conditioning.
Certified Hydrogen gas option available.
http://www.pvatepla.com/en/produkte/plasmaanlagen/microwellen-plasma/photoresist-ashing/gigafab-m
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