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EV Group - Coat / Develop / Resist Processing / Track Equipment Suppliers

 

Company : EV Group

Address 1 : DI Erich Thallner Strasse 1

Address 2 :

City : St. Florian/Inn

State :

Post/Zip Code : A-4782

Country : Austria

 

Phone : +43-7712 5311-0

Fax : +43-7712 5311-4600

 

Email : info@EVGroup.com

 

Visit EV Group Website

 

Industry Memberships:
SEMI Member

 

Description :

EV Group (EVG) is a world leader in wafer-processing solutions for semiconductor, MEMS and nanotechnology applications.  Through close collaboration with its global customers, the company implements its flexible manufacturing model to develop reliable, high-quality, low-cost-of-ownership systems that are easily integrated into customers’ fab lines.  Key products include wafer bonding, lithography/nanoimprint lithography (NIL) and metrology equipment, as well as photoresist coaters, cleaners and inspection systems.

In addition to its dominant share of the market for wafer bonders, EVG holds a leading position in NIL and lithography for advanced packaging and MEMS.  Along these lines, the company co-founded the EMC-3D consortium in 2006 to create and help drive implementation of a cost-effective through-silicon-via (TSV) process for chip packaging and MEMS/sensors.  Other target semiconductor-related markets include silicon-on-insulator (SOI), compound semiconductor and silicon-based power-device solutions.

Founded in 1980, EVG is headquartered in St. Florian, Austria, and operates via a global customer support network, with subsidiaries in Tempe, AZ.; Albany, NY; Yokohama and Fukuoka, Japan; Seoul, Korea and Chung-Li, Taiwan.  The company's unique Triple i-approach (Invent - Innovate - Implement) is supported by a vertical integration, allowing EVG to respond quickly to new technology developments, apply the technology to manufacturing challenges and expedite device manufacturing in high volume.  More information is available at www.EVGroup.com.

Literature

Products

Automated Measurement System
Automated Measurement System

Product Code: EVG®40NT

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Automated NIL (Nanoimprint Lithography) Stepper
Automated NIL (Nanoimprint Lithography) Stepper

Product Code: EVG®770 Gen II

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Integrated Wafer Bonding Systems
Integrated Wafer Bonding Systems

Product Code: GEMINI® Series

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Literature

Literature