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Diamond Scriber

Diamond Scriber

Opto System OSM-90TSD-Y diamond scriber is designed to produce reliable scribing on laser diode and led wafers. The machine utilize a diamond tool for the scribing process. A combination of a constant controlled scribing force and smooth table movements provide the best scribing results on GaAs and InP wafers.

Specification

Wafer Size

Maximum 4 Inches

Precision

±2μm in X axis  ±2μm in Y axis

Scribe Mode

Straight, Point & Dotted

Scribe Speed

10~50㎜/Sec

Scribe Force

5~30g

Magnification

4 Times

Table

Made of Glass

Features

  • Scribing force is controlled by air pressure to achieve constant force regardless of wafer flatness variation.
  • A linear motor is used to control the scribing direction movement of the table .This will minimize wafer chippings due to the table vibration.
  • Diamond tool can be reset and adjusted easily for quick tool replace.
  • Automatic Scribe force is monitored using  a digital indicator

 

Optional

  • Double Camera for Backside Scribing
  • Auto Wafer Alignment Function
  • LD Bar Positioning Camera
  • Wafer size up to 6 Inches
  • Auto Loader

 

For more information

E-mail : optwest@gold.ocn.ne.jp

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