The MEI Evolution series wet processing systems are in-line, configurable, automated, modular, linear batch immersion wafer cleaning systems made for high wafer throughput at a low cost. They are designed for dry in and dry out batch wafer processing of multiple lots of wafers from 100mm to 300mm. Custom configurations combine SECS/GEM interface capabilities, multi step processing, cascade or QDR rinsing with optional chemical injections, maringoni drying and linear robotic transfer capabilities into a system that is tailored for your specific process needs.  MEI IDX Automation software enables industry leading ease of use, and outstanding process controls.