BERLINER GLAS supports the semiconductor industry with innovative chucks for the various processing steps of chip-manufacturing as well as optical key-components, assemblies and systems from design to production.

Specialized in wafer chucks with extremely high flatness and very low parallelism deviation, BERLINER GLAS provides the industry with ultra fast chucking solutions for highest yield and the ultimate benefit for high power fab equipment made of glass/glass-ceramics or ceramics.

The complete spectrum encompasses:

Engineering

• systems engineering
• optical and mechanical design
• coating design

Key-Components

• lenses: spherical, cylindrical, aspherical
• plano and prism optics
• microstructures
• gratings
• special customized coatings (DUV, UV, VIS and NIR)
• components for semiconductor, such as vacuum and electrostatic chucks
• CNC-shaped stages for wafers and masks
• light-weight structures with extreme tight tolerances

Assemblies

• optical assemblies
• opto-mechanical assemblies
• lens systems
• objectives

Systems

• opto-mechanical systems
• electro-optical systems
• integration of optics, mechanics and electronics
• CAD/CAM systems for medical and industrial use

Deterministic fine-polishing and individual metrology available.

Dedicated to photonics, 920 well-trained and experienced employees in Germany, Switzerland, the US and China work on optical solutions for our strategic markets medical, industrial, semiconductor and defence applications as well as for high technology where photonics plays an important role.