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Electrogrip - Electrostatic Chucks Suppliers
Company : Electrogrip
Address 1 : 6945 - 6949 Lynn Way
Address 2 :
City : Pittsburgh
State :
Post/Zip Code : 15208
Country : United States
Phone : +1 4122470992
Fax : +1 4123620991
Email : mail@electrogrip.com
Description :
Electrogrip makes reliable, high-performance electrostatic chuck gripping and support systems used for plasma processing, ion implantation, inspection, robotic handling, and UV/EUV lithography systems; and can grip LCD panels, nonconductors, and semiconductive substrates.
All components, from the high voltage drive through to the electrostatic gripper, have been developed to yield the highest degree of predictable, long-lived results.
Electrogrip's rf- and vacuum- isolated electronics simplifies complex systems; for example see Electrogrip’s website for an rf-isolated 6-pole electrostatic chuck with multi-point monitoring and 6 independent servomotor axes. Electrogrip can provide this type of complete subsystem, including in-process assurance testing and software controls.
Electrogrip's available chuck surfaces include proprietary polymer, crystal, glass, and ceramic materials, with surface processing for minimal particle generation.
All components, from the high voltage drive through to the electrostatic gripper, have been developed to yield the highest degree of predictable, long-lived results.
Electrogrip's rf- and vacuum- isolated electronics simplifies complex systems; for example see Electrogrip’s website for an rf-isolated 6-pole electrostatic chuck with multi-point monitoring and 6 independent servomotor axes. Electrogrip can provide this type of complete subsystem, including in-process assurance testing and software controls.
Electrogrip's available chuck surfaces include proprietary polymer, crystal, glass, and ceramic materials, with surface processing for minimal particle generation.
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