Oxford Instruments Plasma Technology (OIPT) offers flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable etching, deposition and growth of micro- and nano-structures.

Our systems provide process solutions for the micro- and nanometre engineering of materials for semiconductor, optoelectronics, MEMS & microfluidics, high quality optical coating and many other applications in micro- and nanotechnology. These solutions are based on core technologies in:

• Plasma Etch & Deposition
• Atomic Layer Deposition
• Ion Beam Etch & Deposition
• Nanoscale Growth Systems
• Hydride Vapour Phase Epitaxy

Products range from compact stand-alone systems for R&D, through batch tools and up to clustered cassette-to-cassette platforms for high-throughput production processing.

Based near Bristol, UK, OIPT has a network of sales and service offices and agents worldwide.

Customer Support
Oxford Instruments is committed to supporting our customers’ success. We recognise that this requires world-class products, complemented by world-class service and support. Our global service team is backed by regional offices, offering rapid support wherever you are in the world.

Our (Plasma, ALD, Ion Beam and HVPE) customers worldwide do not buy only a product from us, they buy a business solution. We can provide you with service and support solutions that enable you to maintain and grow your business, whether you are running a research facility or a production plant.  

Our support services include the following:

• Tailored  Support Agreements to meet your needs
• Repair & Supply of Genuine Oxford Instruments Spare Parts
• Upgrades to enhance the performance or functionality of your System
• System User and Maintenance Training
• Process Training and support
• Remedial visits in the event of System failure
• Planned Preventative Maintenance visits
• Pre-purchased service funds
• System re-location and re-commissioning
• System refurbishment

Oxford Instruments Plasma Technology is part of Oxford Instruments plc
Oxford Instruments designs, supplies and supports high-technology tools, processes and solutions with a focus on physical science, bioscience, environmental and industrial research and applications. It provides solutions needed to advance fundamental nanoscience research and its transfer into commercial nanotechnology applications. Innovation has been the driving force behind Oxford Instruments’ growth and success for over 40 years, and its strategy is to effect the successful commercialisation of these ideas by bringing them to market in a timely and customer-focused fashion.

The first technology business to be spun out from Oxford University over forty years ago, Oxford Instruments is now a global company with over 1,300 staff worldwide and a listing on the London Stock Exchange (OXIG). Its objective is to be the leading provider of new generation tools and systems for the Physical Science and Bioscience sectors.

This involves the combination of core technologies in areas such as low temperature and high magnetic field environments, Nuclear Magnetic Resonance, X-ray electron and optical based metrology, and advanced growth, deposition and etching. Our products, expertise, and ideas address global issues such as energy, environment, terrorism and health and are part of the next generation of telecommunications, energy products, environmental measures, security devices, drug discovery and medical advances.