SPTS designs and manufactures a range of highly specialized equipment incorporating innovative etch and deposition technologies used in the production of semiconductors and semiconductor related devices.
SPTS technologies are used by semiconduc
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Oxford Instruments Plasma Technology (OIPT) offers flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable etching, deposition and growth of micro- and nano-structures.
Our systems provide
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