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Memsstar Technology - Etching System Suppliers
Company : Memsstar Technology
Address 1 : Starlaw Park, Starlaw Road
Address 2 :
City : Livingston
State :
Post/Zip Code : EH54 85F
Country : United Kingdom
Phone : +44 1506 409160
Fax :
Email : tonie-mckie@memsstar.com
Industry Memberships:
Description :
memsstarR is a technology leader in MEMS processing. memsstarR provides Sacrificial Vapour Phase Release Etch Systems utilising either HF or XeF2 chemistries to meet current and future MEMS process requirements. All wafer processing is performed on a single wafer basis. Tool configurations can range from a single chamber manual R&D system to a fully automated cluster tool for high volume production. Incorporated advanced platform features include : wafer temperature control, gas flow control and fully automated endpoint detection. memsstarR also offers a system for the deposition of hydrophobic coatings for anti-stiction applications. Other coatings include hydrophylic coatings for microfluidic applications.
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