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Oxford Instruments America, Inc. - Etching System Suppliers
Company : Oxford Instruments America, Inc.
Address 1 : 300 Baker Ave Ste 150
Address 2 :
City : Concord
State : MA
Post/Zip Code : 01742-2124
Country : United States
Phone : +1 978 369 9933
Fax :
Email : info@ma.oxfinst.com
Industry Memberships:
Description :
Oxford Instruments manufactures plasma processing equipment for Etch, Deposition, Compound semiconductor etch, Failure Analysis, Dielectric and Metal Sputter Deposition. Included are RIE, PECVD and ICP High Density plasma sources for low stress and low damage Plasma processing which use our own filamentless sources and share the MESC compatible wafer handling systems used on our Plasma systems. In addition, it is also a supplier of x-ray detectors and microanalysis systems for materials identification and classification when used in conjunction with in-Line Defect Review SEMS.
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