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Oxford Instruments K.K. - Etching System Suppliers

 

Company : Oxford Instruments K.K.

Address 1 : 2-11-6 Tomioka Haseman Building

Address 2 :

City : Koto-Ku,

State : Tokyo

Post/Zip Code : 135-0047

Country : Japan

Phone : +81 35 2453261

Fax :

 

Email :

 

 

Industry Memberships:
SEMI Member

 

Description :

ALD(Atomic Layer Deposition) CVD tool. For Compound Semiconductor/MEMS/Photonic, RIE & ICP Etching tool, PE & ICP CVD tool. PE/RIE switching type Etching tool for failure analysis. Ion beam Etching & Deposition tool.

 

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