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Olympus Integrated Technologies - Film Thickness / Thickness Measurement Suppliers
Company : Olympus Integrated Technologies
Address 1 : 180 Baytech Dr.
Address 2 :
City : San Jose
State : CA
Post/Zip Code : 95134-2302
Country : United States
Phone : +1 408 514 39
Fax :
Email : rlafrance@olympus-ita.com
Industry Memberships:
Description :
Olympus Integrated Technologies America (Olympus-ITA), San Jose, CA offers a selection of Wafer Inspection and Defect Review Stations. The AL2100, a 150/200mm highly versatile and very cost effective system offers micro/macro inspection and defect review capabilities. The AL3100 is a 200/300mm capable system offering Bright Field, Dark Field and DUV (248nm) inspection and defect review. Olympus' patented CaF2 air gap DUV objective provides superior imaging. The FR3200 is the next generation 200/300mm station offering fully automated defect review with automated defect classification (ADC). High magnification patented DUV optics (248nm) offer superior resolution at 0.08um. Olympus' high accuracy stage ensures accurate relocation of all defects within the field of view for automated classification. Inspection and manual defect review are also available. The AL3100 and FR3200 both offer front and back side (center and edge) macro inspection under various wavelengths. Olympus 300mm stations are fully compliant wi th all I300I factory automation standards.
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Categories
- Components, Accessories & Parts > Optic / Lens Products > Optics for Deep UV Microlithography
- Equipment Suppliers > Inspection Equipment > General Microscopes
- Equipment Suppliers > Measurement Equipment > Film Thickness / Thickness Measurement
- Equipment Suppliers > Measurement Equipment > Metrology
- Equipment Suppliers > Measurement Equipment > Overlay Measurement
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