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PVA TePla AG - Film Thickness / Thickness Measurement Suppliers


Company : PVA TePla AG

Address 1 : Hans-Riedl-Strasse 5

Address 2 :

City : Kirchheim

State :

Post/Zip Code : D-85551

Country : Germany


Phone : +49 8990 503-127

Fax :


Email :


Visit PVA TePla AG Website


Industry Memberships:
SEMI Member


Description :

PVA TePla AG specializes in unique Microwave Plasma Processing systems forsilicon, compound semiconductor, MEMS, FPD, and solar cell manufacturing.Front-End applications include photo resist ashing and descum, as well aspolymer, SU8 and sacrificial layer removal for MEMS. Pre-assembly solutionsinclude stress relief and back-side passivation (down to 25Ám waferthickness). Back-End applications include pre-wirebonding/pre-encapsulation cleaning and surface activation for Flip Chip, stacked dies, MCM and advanced Cu lead frames. Our metrology tools offer unique stress/defect analysis (SIRD) and ion implantation monitoring (TWIN) for qualityinspection on 12" wafers in high volume manufacturing.


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