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PVA TePla AG - Ion / Beam Milling / Etching Suppliers
Company : PVA TePla AG
Address 1 : Hans-Riedl-Strasse 5
Address 2 :
City : Feldkirchen
State :
Post/Zip Code : 85622
Country : Germany
Phone : 0049 89 905030
Fax :
Email : plasma@pvatepla.com
Industry Memberships:
Description :
PVA TePla AG specializes in unique Microwave Plasma Processing systems forsilicon, compound semiconductor, MEMS, FPD, and solar cell manufacturing.Front-End applications include photo resist ashing and descum, as well aspolymer, SU8 and sacrificial layer removal for MEMS. Pre-assembly solutionsinclude stress relief and back-side passivation (down to 25µm waferthickness). Back-End applications include pre-wirebonding/pre-encapsulation cleaning and surface activation for Flip Chip, stacked dies, MCM and advanced Cu lead frames. Our metrology tools offer unique stress/defect analysis (SIRD) and ion implantation monitoring (TWIN) for qualityinspection on 12" wafers in high volume manufacturing.
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Categories
- Equipment Suppliers > Fabrication & Wafer Processing Technology > Crystal Growth & Machining
- Equipment Suppliers > Fabrication & Wafer Processing Technology > Etching / Stripping / Ashing
- Equipment Suppliers > Fabrication & Wafer Processing Technology > Etching Systems
- Equipment Suppliers > Fabrication & Wafer Processing Technology > Ion / Beam Milling / Etching
- Equipment Suppliers > Fabrication & Wafer Processing Technology > Substrate Cleaning
- Equipment Suppliers > Measurement Equipment > Defect / Particle Detection or Inspection
- Equipment Suppliers > Measurement Equipment > Film Thickness / Thickness Measurement
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