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SCI Instruments - Line Width / Critical Dimension (CD) Measurement Suppliers
Company : SCI Instruments
Address 1 : 6355 Corte Del Abeto Suite C105
Address 2 :
City : Carlsbad
State : CA
Post/Zip Code : 92011
Country : United States
Phone : 760-9303992
Fax : 760-9303994
Email : info@sci-soft.com
Description :
FilmTek™ CD is a cost effective solution for non-destructive optical CD metrology applications, accurately and simultaneously determining period, line width, trench depth, and sidewall angle.
FilmTek™ CD includes proprietary diffraction software with fast, real-time optimization. Real-time optimization allows the user to easily measure unknown structures with minimal setup time and recipe development while avoiding the time and complication associated with library generation.
The combination of spectroscopic, multi-angle measurements with proprietary RCWA and Generalized Ellipsometry methods makes FilmTek™ CD ideally suited for advanced CD metrology applications with extremely small line widths. Available as a manual load, bench-top unit or fully automated with cassette to cassette wafer handling, FilmTek™ CD can be configured to suit a wide range of budgets and end use applications.
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