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SCI Instruments - Line Width / Critical Dimension (CD) Measurement Suppliers


Company : SCI Instruments

Address 1 : 6355 Corte Del Abeto Suite C105

Address 2 :

City : Carlsbad

State : CA

Post/Zip Code : 92011

Country : United States


Phone : 760-9303992

Fax : 760-9303994


Email :


Visit SCI Instruments Website



Description :

FilmTek™ CD is a cost effective solution for non-destructive optical CD metrology applications, accurately and simultaneously determining period, line width, trench depth, and sidewall angle. 

FilmTek™ CD includes proprietary diffraction software with fast, real-time optimization.  Real-time optimization allows the user to easily measure unknown structures with minimal setup time and recipe development while avoiding the time and complication associated with library generation. 

The combination of spectroscopic, multi-angle measurements with proprietary RCWA and Generalized Ellipsometry methods makes FilmTek™ CD ideally suited for advanced CD metrology applications with extremely small line widths.  Available as a manual load, bench-top unit or fully automated with cassette to cassette wafer handling, FilmTek™ CD can be configured to suit a wide range of budgets and end use applications.



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