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Brooks Instrument - Mass Flow Controllers Suppliers
Company : Brooks Instrument
Address 1 : PO Box 903
Address 2 :
City : Hatfield
State : PA
Post/Zip Code : 19440-0903
Country : United States
Phone : +1 215 362 35
Fax :
Email : brooksAm@frmail.frco.com
Industry Memberships:
Description :
Flow instrumentation for semiconductor processing: Brooks Instrument provides a comprehensive line of flow and pressure measurement and control products. Mass Flow Controllers; Flow Meters and Pressure Controllers. Elastomer and Metal Seals; Ultra Clean Processing; Reduced Laylength, Digital Processing/Communications, and TruCalTM actual gas calibrations. Corilis PFA mass-flow controllers for CMP slurries and other process chemicals.
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