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FHR Anlagenbau GmbH - Chemical Vapor Deposition (CVD) - Metal / Silicide Suppliers
Company : FHR Anlagenbau GmbH
Address 1 : Hohenbusch Markt 1
Address 2 :
City : Dresden
State :
Post/Zip Code : 01108
Country : Germany
Phone : +49 0351 882440
Fax :
Industry Memberships:
Description :
FHR is providing sputtering and etching equipment and processes for semiconductors,sensors,flat panels and others. Cluster handling platforms up to 300mm substrate diameter in combination with different process modules are available. Another line is the production of sputtering targets with the in-house metal bonding technology. FHR represents Scanning Probe Microscopes of DME Danish Micro Engineering AVS,pure gas components of FLOWLINK S.A. France and horizontal furnaces for annealing diffusion and CVD of TYSTAR, USA.
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