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PureAire Monitoring Systems, Inc. - Ozone Monitors Suppliers
Company : PureAire Monitoring Systems, Inc.
Address 1 : 557 Capital Dr.
Address 2 :
City : Lake Zurich
State : IL
Post/Zip Code : 60047-6711
Country : United States
Phone : +1 847-726-6000
Fax : +1 847-726-6051
Email : pureaire@dls.net
Description :
Continuous smart toxic gas monitoring systems for the detection of semiconductor fabrication and process gases. Gas monitors provide low-level detection of hydride, corrosive, pyrophoric, LEL, Oxygen, Ozone and PFC’s.
Also available are Fluorine monitors for detecting gases in both wet and dry point-of-use abatement scrubbers. Introducing gas monitors with wireless and modbus communications, including a new continuous duty oxygen deficiency monitor for vacuum environments in process and transfer chambers.
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Categories
- Equipment Suppliers > Measurement Equipment > Leak Detection Systems
- Equipment Suppliers > Measurement Equipment > Ozone Monitors
- Factory Control & Facilities > Air > Gas Detection
- Factory Control & Facilities > Gases > Gas & Other Generation Systems
- Factory Control & Facilities > Gases > Gas Handling (Cabinets, Control, Supply)
- Factory Control & Facilities > Gases > Gas Monitoring / RGA's / TGO Compliance
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