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Tegal Corporation - Physical Vapor Deposition (PVD) Suppliers
Company : Tegal Corporation
Address 1 : 2201 S. McDowell Blvd.
Address 2 :
City : Petaluma
State : CA
Post/Zip Code : 94954
Country : United States
Phone : +1 707-763-5600
Fax :
Email : info@tegal.com
Description :
Focused Innovation. Solid Results.
Tegal is an innovator of specialized production solutions for the fabrication of advanced MEMS, power ICs and optoelectronics. Our plasma etch and deposition tools enable sophisticated manufacturing techniques, such as 3D interconnect structures formed by intricate silicon etch, also known as Deep Reactive Ion Etching. We combine proven expertise with practical system strategies to deliver application-specific solutions that are robust and reliable, for applications such as:
Silicon DRIE MEMS and TSV Etch
PVD and Plasma Etch for AlN, PZT, and other Piezoelectric Films
Precision Descum
Stress-Controlled PVD for Metal Films on Thin Wafers
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