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MKS Instruments, Inc. - Plasma Sources / Controls / Monitoring / Diagnosis Suppliers
Company : MKS Instruments, Inc.
Address 1 : 2 Tech Dr Ste 201
Address 2 :
City : Andover
State : MA
Post/Zip Code : 01810-2434
Country : United States
Phone : +1 978 645-5500
Fax :
Email : mks@mksinst.com
Industry Memberships:
Description :
MKS Instruments is a leading global supplier of instruments and integrated subsystems that measure, control, power and monitor the critical parameters of semiconductor and advanced manufacturing process environments. To enable higher productivity, we support our OEM and end-user customers around the world with a broad offering of best-in-class products, extensive applications expertise, world-class manufacturing and technical support. MKS products include: process capacitance manometers; gas delivery pressure transducers; pressure controllers and valves; mass-flow controllers; pressure and gas-flow calibration systems; vacuum gauges; vacuum valves, components, heaters, and traps; process monitors; portable helium leak detectors; gas-analysis and wafer metrology products; RF, DC, and microwave power supplies; reactive gas and ozone generators; digital control network products, such as I/O modules and serial gateways; process controllers; and hardware/software solutions for real-time fab data collection, distribution and presentation.
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