Plasma-Therm, LLC is the global technological leader for designing, manufacturing and supporting plasma etch and plasma enhanced chemical vapor deposition (PECVD) equipment to various high technology market segments and industries. Plasma-Therm systems are used in markets ranging from leading edge university R&D to high volume production.

Our served markets include photomask etching, compound semiconductor, wireless communication, MEMS, nanotechnology, data storage, solar cells and LED/photonics processing.

Throughout our over 30 year history, Plasma-Therm, LLC has valued our customer relationships above all else. We provide customized service to meet the needs of our customers. Whether you need support from a process technologist at our advanced applications lab or a local customer service engineer, someone is there to help. Our customer service engineers are knowledgeable to the specifics of each system to help ensure our customers high uptime and equipment utilization.

We maintain a global footprint with more than 15 sales and service locations throughout the United States, Europe, and Asia. Customers are supported from three globally located spare parts warehouses and by more than 50 factory qualified service engineers.