IMS Nanofabrication AG - Lithography Suppliers

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Company : IMS Nanofabrication AG

Address 1 : Schreygasse 3

Address 2 :

City : Vienna

State : A-1020

Post/Zip Code :

Country : Austria

Phone : +43 1 21 44 894 24

Fax : +43 1 21 44 894 99

Description :

Development and fabrication of PML2 (Projection Mask-Less Lithography, with electron multi-beams) and PMLP (Projection Mask-Less Patterning) tools:

- iMET (ion Mask Exposure Tool) for the 22nm mask node and below

- CHARPAN ET (Charged Particle Nanotechnology Engineering Tool) for sub-20nm nanotechnology applications

- PML2 Alpha Tool, for sub-32nm hp maskless lithography

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