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SUSS MicroTec - Lithography Suppliers
Company : SUSS MicroTec
Address 1 : Schleissheimer Strasse 90
Address 2 :
City : Garching near Munich
State :
Post/Zip Code : 85748
Country : Germany - [view global branches]
Phone : 49 (0)89 32007-0
Fax :
Email : info@suss.com
Industry Memberships:
Find us on:
Description :
SUSS MicroTec is a leading supplier of equipment and process solutions for microstructuring for the semiconductor industry and related markets.
The solution portfolio covers all performance relevant steps for wafer processing ranging from coating, baking, developing, aligning to wafer bonding and is complemented by specialized add-ons such as photomasks, nanoimprint lithography tools and optical lenses.
In close cooperation with research institutes and industry partners SUSS MicroTec is pushing forward next-generation technologies such as 3D Integration and nanoimprint lithography as well as key processes for MEMS and LED manufacturing.
With a global infrastructure for applications and service SUSS MicroTec supports more than 8,000 installed systems. SUSS MicroTec is headquartered in Garching near Munich, Germany.
Products
Literature
- 300 mm Lithography and Bonding Technologies for TSV applications in Image Sensor and Memory products (0.47Mb)
- Introduction of a unified equipment platform for UV initiated processes in conjunction with the application of electrostatic carriers as thin wafer handling solution (0.19Mb)
- SUSS MicroTec Product Overview (0.79Mb)
- Wafer-Level Cameras - Novel Fabrication and Packaging Technologies (0.43Mb)
- White Paper: Half-tone Proximity Lithography (1.56Mb)
- White Paper: UV Enhanced Substrate Conformal Imprint Lithography (UV-SCIL) Technique for Photonic Crystals Patterning in LED Manufacturing (1.19Mb)
Press Releases
- Wednesday, January 13, 2010 - SUSS MicroTec AG: Contract Negotiations for the Purchase of HamaTech APE GmbH & Co. KG Successfully Concluded
- Tuesday, January 19, 2010 - SUSS MicroTec Expands Activities in Wafer-Level Camera Applications
- Thursday, January 28, 2010 - Cascade Microtech and SUSS MicroTec Forge Technology Alliance
- Thursday, January 28, 2010 - SUSS MicroTec AG sells Test Systems Division
Events
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Gallery
Categories
- Equipment Suppliers > Fabrication & Wafer Processing Technology > Aligners - Film Coating
- Equipment Suppliers > Fabrication & Wafer Processing Technology > Aligners - Photo-Optical
- Equipment Suppliers > Fabrication & Wafer Processing Technology > Bonding
- Equipment Suppliers > Fabrication & Wafer Processing Technology > Coat / Develop / Resist Processing / Track Equipment
- Equipment Suppliers > Fabrication & Wafer Processing Technology > Lithography
- Equipment Suppliers > Fabrication & Wafer Processing Technology > Wafer Cleaning Systems
- Equipment Suppliers > Fabrication & Wafer Processing Technology > Wet Processing Systems
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