Semiconductor buyers guide, directory and reference site.
Metrology Overview
Metrology is the science of measurement, both experimental and theoretical determinations at any level of uncertainty in any field of science and technology. In the semiconductor industry, metrology instruments are designed for wafer and thin film in-line inspection. There are strict standards in order to accommodate these small dimensions and make sure that all metrology equipment has high precision.
Metrology instruments did not start becoming as focused and articulate as it is today until the Scientific Revolution in 1543. At this time, concern with particles such as atoms and subatomic particles became of interest to chemists and physicians. Through these advances, scientists were able to develop electron microscopes and atomic force microscopes, such as the ones used in semiconductor assembly.
Metrology in the semiconductor industry mostly applies to polarimetry and can be applied to sub-micron level particles (0.4 to 1 micrometer) as well as the microelectronics circuitry. Granulometry, used in sub-micron particles, is the measurement of the density and size distribution of sub-micron particle solutions in terms of an image or imprint, while scatterometry is the use of UV-visible spectroscopic ellipsometry measurements done at the zero order to determine a normalized cross section. This process uses a pulse of microwave energy, while granulometry is carried out through particle distribution. Metrology also accounts for the characterization of particles on silicon surfaces starting from the size of 200 nm.
Metrology devices use a combination of electron beam, optical, and laser technology. Different metrology instruments for semiconductor include the following:
- C-V systems
- CD-SEMs
- Diffractometers
- Ellipsometers
- Imaging stations
- Ion mills
- Wafer probers
Metrology does not affect just one stage of semiconductor manufacturing but all of them. They help improve quality and output at every stage of production. Manufacturers can facilitate semiconductor inspection, reduce costs, and shorten the product development cycle with the use of metrology tools with the help of metrology instruments.
Metrology Suppliers
Vistec Electron Beam GmbH is a world leader in the design and manufacture of electron beam lithography systems. The company provides systems to both key semiconductor manufacturers as well a Universities and Centres of Excellence.
The applicati
...more...
SITE SPONSORS
SITE SPONSORS
- Contact us |
- Terms of use |
- Privacy policy |
- Site Map |
© Semi-Directory 2010