Company : ANNEALSYS
Address 1 : Bat T2, PIT de la Pompignane
Address 2 : Rue de la Vieille Poste
City : Montpellier
State :
Post/Zip Code : 34055
Country : France - [view global branches]
Phone : +33467202363
Fax : +33467202689
Email : info@annealsys.com
Description :
Annealsys manufactures Rapid Thermal Processing and Chemical Vapor Deposition equipment for R&D and production applications.
Annealsys provides worldwide sales and service.
RTP systems are available for wafers up to 200 mm for RTP and RTCVD processes. Cold wall chamber, lamp furnace, high temperature (>1500°C) and custom features are available.
MOCVD systems include 2-inch (RTP capability), 4-inch and 200 mm machines dedicated to metal and alloys, oxides, nitrides, carbon nanotubes and other materials.
2-inch spray CVD system with in-situ annealing capability and LPCVD furnaces are also available.
Annealsys represents Cambridge Nanotech for ALD systems and Intercovamex for sputtering and evaporation systems.