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SONOSYS Ultraschallsysteme GmbH - Wafer Drying System Suppliers
Company : SONOSYS Ultraschallsysteme GmbH
Address 1 : Daimlerstrasse 6
Address 2 :
City : Neuenbuerg
State :
Post/Zip Code : D-75305
Country : Germany
Phone : +49 708 279 1840
Fax :
Email : info@sonosys.de
Industry Memberships:
Description :
SONOSYS® GmbH is a specialized in developing , manufacturing and distributing of sophisticated Megasonic Cleaning Systems for single-wafer and batch processes, in the frequency range from 400kHz to 3MHZ. SONOSYS® Megasonic provides highly efficient removal of sub-micron sized particles on Semiconductor Wafers, Flat Panel Displays, Masks, Micro Systems and within the LIGA-Technique. SONOSYS® Megasonic systems are available in a varity of materials and designs: Megasonic Tanks, Transducer Plates , Submersible Transducer, Face-To-Face-Transducer,Megasonic Single /Dual Nozzle with 1 MHZ + 3MHz, Shower-Nozzle 1 MHz and very compact modular Megasonic Generators up to 2000 Watt.
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