Aerotech designs and manufactures motion control and positioning systems and components for high precision wafer processing, flat-panel display fabrication, scanning electron microscopy, wafer bumping, lithography equipment, and advanced laser micromachining. We also specialize in systems and components for vacuum applications, such as EUV lithography and scanning electron microscopy. So whether a customer needs off-the-shelf wafer bumping components or a custom-engineered scanning electron microscopy system manufactured and tested to exacting specifications, Aerotech can provide the optimal solution for your application.

Aerotech is a leader in high-throughput motion and automation systems for thin film photovoltaic manufacturing. Our SolarScribe motion system, for example, offers simultaneous high speed positioning and triggering of multiple independent scribing lasers. The SolarScribe is an adaptable motion and control platform, configurable for a variety of panel sizes and thin film processes such as CIS, CIGS, CdTe.

Aerotech manufactures complete, multi-axis, vacuum-compatible motion systems for high-performance applications such as Extreme Ultraviolet (EUV) Lithography and other lithography equipment, Scanning Electron Microscopy (SEM), Ion Beam Profiling, E-Beam Inspection, and wafer bumping. These systems include ultra-high accuracy with nanometer-level in-position stability.

For applications such as scanning electron microscopy, vacuum preparation for 10-8 torr (1.3 x 10-8 mbar) is achieved by incorporating vented hardware, vacuum compatible lubrication, and special cabling. Custom systems can achieve 10-9 torr vacuum levels. Aerotech can provide systems with partial pressure (outgassing) limits at specific atomic mass units. Systems are RGA verification tested. Aerotech also manufactures brushless linear and rotary motors with tightly controlled magnetic fields that can be liquid or gas-cooled to improve thermal management. Finally, special handling and cleaning procedures along with careful material selection allow for the lowest Total Mass Loss (TML) and Collected Volatile Condensable Materials (CVCM) possible.

SolarScribe PV Motion Platform

XY Linear Motor Driven
Vacuum-Compatible Motion System

Brushless Motors:
Standard NEMA sizes for easy integration and retrofitting

Aerotech is committed to supporting its customers worldwide. We maintain a growing number of direct field sales and engineering offices throughout the U.S., as well as representatives across the globe. We operate full sales and service facilities in the U.K., Germany, and Japan.